Quick annealing furnace AG Heatpulse 610 Technical parameter description

The AG Heatpulse 610 rapid annealing system provided by Allwin21 Corp is the second-generation product of AG. Because of its excellent temperature control performance and low price, it is still favored by semiconductor device research and development institutions and manufacturers and is widely used in semiconductor Device R & D and production and other fields.

â–  Superior process control:

• Monolithic, closed-loop temperature control;

• Accurate temperature control components can be applied to special process requirements;

• Rapid heating and cooling control;

• High process repeatability.

â–  Process use:

• Rapid annealing after ion implantation;

• Ohmic contact fast alloy;

• Annealing of silicide alloy;

• Oxide growth;

• Other rapid heat treatment processes.

â–  Comparison with general tube high temperature furnace:

• Generally, only one process condition (that is, one temperature condition) can be set for the tube high-temperature furnace; the process period is long, and the use is not flexible enough; it must be powered on for 24 hours to maintain a constant temperature, and the energy consumption is high, which is not suitable for production.

• AG610 series rapid annealing furnace can set multiple process conditions (ie multiple temperature conditions); short process time, very flexible to use; low energy consumption; the same equipment can be used for production and scientific research, and any Scientific research process conditions will not affect the production process.

Technical Parameters:

Main Specifications

Original indicators

Upgraded indicators

temperature control

Temperature range in steady state (℃)

400-1150

400–1250

Temperature measurement accuracy (℃)

± 1.2

± 0.15

Temperature control repeatability (℃)

± 3

± 0.5

Temperature control accuracy (℃)

± 7

± 1

Temperature state process time (S)

1-300 (400-1150 ℃)

1-300 (400-1250 ℃)

Heating rate (℃ / S)

10-80

10-80

Cooling rate (℃ / S)

5-80

5-80

Temperature control mode

PID control

New model with higher adaptability

Software function

Controller

80386 microcomputer

Pentium III Microcomputer

User Interface

Text interface

Graphical interface (GUI)

data storage

no

Process data stored on hard disk

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