1. The special process of the microelectronics industry clean room determines its characteristics and fire hazard:
(1) There are a large number of clean rooms in the factory with special plates. The clean room is a relatively confined space, and some are still without a window. Generally, the ventilation window is not provided, and in the event of a fire in the confined space, the heat is difficult to dissipate, generating a large amount of flue gas, which causes great difficulty for personnel evacuation and fire fighting.
(2) The plant requires high precision and automation of the processing equipment, so the investment in construction and production equipment is very expensive. In the event of a fire, serious economic losses will result.
(3) Most of the plant operation processes require the use of flammable or explosive liquids or gases. Once a liquid or gas leaks, it may cause a fire or explosion.
(4) There are many electrical equipments in the clean room, and most of the lines are dark. It is difficult to overhaul. It is difficult to find when there is a fault or fire.
(5) There are many pipes (such as ventilation pipes and cable pipes) in the factory building that communicate with each other across the floor. A fire will occur and the fire will spread rapidly along the pipes.
(6) Corridors and passage pipes in the factory building are arranged in such a way as to be twisted and twisted due to the special requirements of the process, and evacuation of personnel is difficult.
(7) The interior decoration uses some polymer synthetic materials, which generate smoke when burning, emit poison gas, and some burn very fast.
Second, in view of the particularity and fire hazard of the clean room in the microelectronics industry, the following aspects should be noted in the design of building fire protection:
(1) Fire separation
1. The fire resistance rating of the clean workshop should not be lower than the second grade.
2. Determination of the number of floors in the clean factory: Due to the process requirements, the height of the clean factory is generally higher than that of the ordinary factory, and it is necessary to set up the upper and lower technical interlayers or technical clamps. Some equipment, fans, ducts, cables, gases and liquids are installed in the interlayer. Conveying pipe. It is connected to the clean area by hollowed out floors, suspended ceilings or intricate pipes. If the technical interlayer is counted as an independent layer, the fire separation is obviously very difficult. The author draws on the expert's opinion that the upper and lower technical interlayers and production areas can be considered as one layer, but the corresponding fire protection facilities should be installed in the upper and lower mezzanine.
3. The fire compartment of the clean plant. Due to the needs of the process, the production line length of the production workshop has reached more than 200 meters. It is completely unrealistic to set the fire protection zone according to the requirements of the "Code for Fire Protection of Civil Building Design". In view of the small number of employees in this type of industry, if the safety evacuation conditions and fire-fighting facilities are strengthened, fire-proof zones can be set according to production needs.
(2) Safe evacuation
1. Safe exit and evacuation passage: In the design of clean workshops, the safe evacuation of personnel is particularly important and complicated. The number of safety exits for each production layer, each fire zone or each clean zone shall be not less than two in accordance with the Code for Design of Clean Plants, and the safety exits shall be dispersed. When designing, the evacuation route should be separated from the process as much as possible to meet the purification route from any one production site to the safe exit without tortuous people. It should be straightforward to avoid twists and turns, and set clear indication signs on the walk.
2. The requirements for fire and rescue entrances and exits: Since the clean workshop is a closed room, once a fire occurs, it will bring difficulties to the firefighters. Therefore, the external wall of the clean factory should be equipped with special fire protection for the firefighters to the clean area of ​​the factory. The distance between the fire mouth and the fire exit is not more than 80m, the width should not be less than 750mm, the height should not be less than 1900mm, and there should be obvious signs. The fire exit can be closed normally, and the firefighters can open from the outside when used. In the design, the fire rescue entrance door in the factory building should be opened in the stairwell or on the evacuation aisle as much as possible to ensure the safety of the firefighters.
(3) Interior decoration
The ceiling and siding of the clean room (including the sandwich material) shall be non-combustible, and organic composite materials shall not be used. A non-combustible partitioning facility shall be provided between the clean production and the general production area. This avoids the occurrence of a fire in either room or the other, and avoids the generation of suffocating gases and harmful gases during combustion. At present, most of the metal siding for clean rooms produced by domestic and foreign manufacturers can meet the above requirements.
(4) Fire water supply and fire extinguishing equipment
1. The indoor fire hydrant should be installed in the production layer of the clean room and the upper and lower technology plus layer (excluding the non-passing technical interlayer). The water consumption of the fire hydrant shall not be less than 10L/s, and the water output of each water gun shall not be less than 5L/s.
2. The room with valuable equipment and instruments in the clean factory shall be provided with fixed fire-fighting facilities. When setting up a sprinkler system, a pre-action sprinkler system should be used. When a gas fire-extinguishing system is installed, an extinguishing agent that causes suffocation and secondary damage to the protected object should not be used.
(5) Fire communication facilities
Due to the extensive use of sheet metal in the clean room, the shielding effect is generally strong. Therefore, a complete set of fire communication facilities should be installed in the clean room. This facility not only provides internal police personnel with alarm and communication after fire, but also provides firefighting officers and soldiers involved in fire fighting to ensure the smooth communication of fire stations and reduce unnecessary communication interruptions and communication failures to ensure the safety of firefighters. .
(6) Ventilation and smoke prevention
1. Exhaust air in flammable and explosive areas should be separated from the general area, set separately, and select explosion-proof exhaust fan.
2. In order to ensure production safety and employee safety, an accident exhaust system should be set up. The accident exhaust system shall be provided with automatic and manual control switches, and the manual control switches shall be located in the clean room and the clean room for easy operation.
3. Mechanical smoke and smoke prevention facilities should be installed in the corridors of clean workshops. There are many types of pipelines in the clean plant. If it is difficult to add a set of smoke control and exhaust pipes, the clean room mechanical smoke control system can be used in ventilation and purification air conditioning systems, but reliable fire safety measures must be taken.
4. The air duct should be made of non-combustible materials and fire dampers should be set according to the requirements of relevant regulations.
(7) Electrical
1. Emergency lighting and evacuation signs for evacuation should be provided in the clean room. Red emergency lights should be placed at the fire exit.
2. The standby lighting should be set up in the clean room to meet the required minimum illumination of the activities and work required by the site or location. Generally, it should not be lower than 1/10 of the normal lighting illumination standard.
3. Fire alarm detectors should be installed in the clean production area (including technical mezzanine), machine room and station building. Manual fire alarm buttons should be installed in the production area and corridor of the clean factory.
4. Anti-static grounding measures shall be taken for equipment, flowing liquid, gas or powder pipelines that may cause static electricity in the clean room.
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